JPH0372923B2 - - Google Patents
Info
- Publication number
- JPH0372923B2 JPH0372923B2 JP58063581A JP6358183A JPH0372923B2 JP H0372923 B2 JPH0372923 B2 JP H0372923B2 JP 58063581 A JP58063581 A JP 58063581A JP 6358183 A JP6358183 A JP 6358183A JP H0372923 B2 JPH0372923 B2 JP H0372923B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- electron beam
- sem
- scanning
- measuring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 45
- 238000001514 detection method Methods 0.000 claims description 28
- 230000003287 optical effect Effects 0.000 claims description 26
- 238000005259 measurement Methods 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 9
- 230000001678 irradiating effect Effects 0.000 claims description 5
- 230000001133 acceleration Effects 0.000 claims description 3
- 239000000523 sample Substances 0.000 claims 7
- 238000012935 Averaging Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 description 18
- 238000009792 diffusion process Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 10
- 238000003708 edge detection Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/026—Means for avoiding or neutralising unwanted electrical charges on tube components
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58063581A JPS59190610A (ja) | 1983-04-13 | 1983-04-13 | 寸法測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58063581A JPS59190610A (ja) | 1983-04-13 | 1983-04-13 | 寸法測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59190610A JPS59190610A (ja) | 1984-10-29 |
| JPH0372923B2 true JPH0372923B2 (en]) | 1991-11-20 |
Family
ID=13233368
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58063581A Granted JPS59190610A (ja) | 1983-04-13 | 1983-04-13 | 寸法測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59190610A (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0949653B1 (en) * | 1991-11-27 | 2010-02-17 | Hitachi, Ltd. | Electron beam apparatus |
| JP2008177064A (ja) * | 2007-01-19 | 2008-07-31 | Hitachi High-Technologies Corp | 走査型荷電粒子顕微鏡装置および走査型荷電粒子顕微鏡装置で取得した画像の処理方法 |
-
1983
- 1983-04-13 JP JP58063581A patent/JPS59190610A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59190610A (ja) | 1984-10-29 |
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